| Natural frequency | Vertical: 1.1Hz |
| Horizontal: 0.5Hz | |
| Vibration isolation method | Vertical: Diaphragm air spring |
| Horizontal: Parallel swing mechanism | |
| Damping method | Vertical: Air damping using variable orifices |
| Horizontal: Special damping using the α-GEL | |
| Leveling method | Automatic levelers keep the surface table level automatically |
| Load weight(kg) | 300 |
| Table dimensions(mm) | 1000×750 |
| Table thickness(mm) | 100 |
| Table materials | Steel Honeycomb: Top plate SUS430 5t(4t), Bottom plate SS400 4.5t |
| Machine height(mm) | 800 |
| Machine weight(kg) | 220 |
| Air supply | 0.35~0.70MPa |
| Natural frequency | Vertical: 1.1Hz |
| Horizontal: 0.5Hz | |
| Vibration isolation method | Vertical: Diaphragm air spring |
| Horizontal: Parallel swing mechanism | |
| Damping method | Vertical: Air damping using variable orifices |
| Horizontal: Special damping using the α-GEL | |
| Leveling method | Automatic levelers keep the surface table level automatically |
| Load weight(kg) | 300 |
| Table dimensions(mm) | 1200×900 |
| Table thickness(mm) | 200 |
| Table materials | Steel Honeycomb: Top plate SUS430 5t(4t), Bottom plate SS400 4.5t |
| Machine height(mm) | 800 |
| Machine weight(kg) | 280 |
| Air supply | 0.35~0.70MPa |
| Natural frequency | Vertical: 1.1Hz |
| Horizontal: 0.5Hz | |
| Vibration isolation method | Vertical: Diaphragm air spring |
| Horizontal: Parallel swing mechanism | |
| Damping method | Vertical: Air damping using variable orifices |
| Horizontal: Special damping using the α-GEL | |
| Leveling method | Automatic levelers keep the surface table level automatically |
| Load weight(kg) | 300 |
| Table dimensions(mm) | 1500×1000 |
| Table thickness(mm) | 200 |
| Table materials | Steel Honeycomb: Top plate SUS430 5t(4t), Bottom plate SS400 4.5t |
| Machine height(mm) | 800 |
| Machine weight(kg) | 340 |
| Air supply | 0.35~0.70MPa |
| Natural frequency | Vertical: 1.1Hz |
| Horizontal: 0.5Hz | |
| Vibration isolation method | Vertical: Diaphragm air spring |
| Horizontal: Parallel swing mechanism | |
| Damping method | Vertical: Air damping using variable orifices |
| Horizontal: Special damping using the α-GEL | |
| Leveling method | Automatic levelers keep the surface table level automatically |
| Load weight(kg) | 300 |
| Table dimensions(mm) | 1500×1200 |
| Table thickness(mm) | 200 |
| Table materials | Steel Honeycomb: Top plate SUS430 5t(4t), Bottom plate SS400 4.5t |
| Machine height(mm) | 800 |
| Machine weight(kg) | 380 |
| Air supply | 0.35~0.70MPa |
| Natural frequency | Vertical: 1.1Hz |
| Horizontal: 0.5Hz | |
| Vibration isolation method | Vertical: Diaphragm air spring |
| Horizontal: Parallel swing mechanism | |
| Damping method | Vertical: Air damping using variable orifices |
| Horizontal: Special damping using the α-GEL | |
| Leveling method | Automatic levelers keep the surface table level automatically |
| Load weight(kg) | 300 |
| Table dimensions(mm) | 1800×900 |
| Table thickness(mm) | 200 |
| Table materials | Steel Honeycomb: Top plate SUS430 5t(4t), Bottom plate SS400 4.5t |
| Machine height(mm) | 800 |
| Machine weight(kg) | 365 |
| Air supply | 0.35~0.70MPa |
| Natural frequency | Vertical: 1.1Hz |
| Horizontal: 0.5Hz | |
| Vibration isolation method | Vertical: Diaphragm air spring |
| Horizontal: Parallel swing mechanism | |
| Damping method | Vertical: Air damping using variable orifices |
| Horizontal: Special damping using the α-GEL | |
| Leveling method | Automatic levelers keep the surface table level automatically |
| Load weight(kg) | 300 |
| Table dimensions(mm) | 1800×1200 |
| Table thickness(mm) | 200 |
| Table materials | Steel Honeycomb: Top plate SUS430 5t(4t), Bottom plate SS400 4.5t |
| Machine height(mm) | 800 |
| Machine weight(kg) | 430 |
| Air supply | 0.35~0.70MPa |
| Natural frequency | Vertical: 1.1Hz |
| Horizontal: 0.5Hz | |
| Vibration isolation method | Vertical: Diaphragm air spring |
| Horizontal: Parallel swing mechanism | |
| Damping method | Vertical: Air damping using variable orifices |
| Horizontal: Special damping using the α-GEL | |
| Leveling method | Automatic levelers keep the surface table level automatically |
| Load weight(kg) | 300 |
| Table dimensions(mm) | 2000×1000 |
| Table thickness(mm) | 200 |
| Table materials | Steel Honeycomb: Top plate SUS430 5t(4t), Bottom plate SS400 4.5t |
| Machine height(mm) | 800 |
| Machine weight(kg) | 405 |
| Air supply | 0.35~0.70MPa |
| Natural frequency | Vertical: 1.1Hz |
| Horizontal: 0.5Hz | |
| Vibration isolation method | Vertical: Diaphragm air spring |
| Horizontal: Parallel swing mechanism | |
| Damping method | Vertical: Air damping using variable orifices |
| Horizontal: Special damping using the α-GEL | |
| Leveling method | Automatic levelers keep the surface table level automatically |
| Load weight(kg) | 300 |
| Table dimensions(mm) | 2000×1200 |
| Table thickness(mm) | 200 |
| Table materials | Steel Honeycomb: Top plate SUS430 5t(4t), Bottom plate SS400 4.5t |
| Machine height(mm) | 800 |
| Machine weight(kg) | 455 |
| Air supply | 0.35~0.70MPa |
| Natural frequency | Vertical: 1.1Hz |
| Horizontal: 0.5Hz | |
| Vibration isolation method | Vertical: Diaphragm air spring |
| Horizontal: Parallel swing mechanism | |
| Damping method | Vertical: Air damping using variable orifices |
| Horizontal: Special damping using the α-GEL | |
| Leveling method | Automatic levelers keep the surface table level automatically |
| Load weight(kg) | 300 |
| Table dimensions(mm) | 2000×1500 |
| Table thickness(mm) | 200 |
| Table materials | Steel Honeycomb: Top plate SUS430 5t(4t), Bottom plate SS400 4.5t |
| Machine height(mm) | 800 |
| Machine weight(kg) | 550 |
| Air supply | 0.35~0.70MPa |
| Natural frequency | Vertical: 1.1Hz |
| Horizontal: 0.5Hz | |
| Vibration isolation method | Vertical: Diaphragm air spring |
| Horizontal: Parallel swing mechanism | |
| Damping method | Vertical: Air damping using variable orifices |
| Horizontal: Special damping using the α-GEL | |
| Leveling method | Automatic levelers keep the surface table level automatically |
| Load weight(kg) | 300 |
| Table dimensions(mm) | 2200×1000 |
| Table thickness(mm) | 200 |
| Table materials | Steel Honeycomb: Top plate SUS430 5t(4t), Bottom plate SS400 4.5t |
| Machine height(mm) | 800 |
| Machine weight(kg) | 435 |
| Air supply | 0.35~0.70MPa |
| Natural frequency | Vertical: 1.1Hz |
| Horizontal: 0.5Hz | |
| Vibration isolation method | Vertical: Diaphragm air spring |
| Horizontal: Parallel swing mechanism | |
| Damping method | Vertical: Air damping using variable orifices |
| Horizontal: Special damping using the α-GEL | |
| Leveling method | Automatic levelers keep the surface table level automatically |
| Load weight(kg) | 300 |
| Table dimensions(mm) | 2200×1200 |
| Table thickness(mm) | 200 |
| Table materials | Steel Honeycomb: Top plate SUS430 5t(4t), Bottom plate SS400 4.5t |
| Machine height(mm) | 800 |
| Machine weight(kg) | 490 |
| Air supply | 0.35~0.70MPa |
| Natural frequency | Vertical: 1.1Hz |
| Horizontal: 0.5Hz | |
| Vibration isolation method | Vertical: Diaphragm air spring |
| Horizontal: Parallel swing mechanism | |
| Damping method | Vertical: Air damping using variable orifices |
| Horizontal: Special damping using the α-GEL | |
| Leveling method | Automatic levelers keep the surface table level automatically |
| Load weight(kg) | 300 |
| Table dimensions(mm) | 2200×1500 |
| Table thickness(mm) | 200 |
| Table materials | Steel Honeycomb: Top plate SUS430 5t(4t), Bottom plate SS400 4.5t |
| Machine height(mm) | 800 |
| Machine weight(kg) | 590 |
| Air supply | 0.35~0.70MPa |
| Natural frequency | Vertical: 1.1Hz |
| Horizontal: 0.5Hz | |
| Vibration isolation method | Vertical: Diaphragm air spring |
| Horizontal: Parallel swing mechanism | |
| Damping method | Vertical: Air damping using variable orifices |
| Horizontal: Special damping using the α-GEL | |
| Leveling method | Automatic levelers keep the surface table level automatically |
| Load weight(kg) | 300 |
| Table dimensions(mm) | 2400x1200 |
| Table thickness(mm) | 200 |
| Table materials | Steel Honeycomb: Top plate SUS430 5t(4t), Bottom plate SS400 4.5t |
| Machine height(mm) | 800 |
| Machine weight(kg) | 530 |
| Air supply | 0.35~0.70MPa |
| Natural frequency | Vertical: 1.1Hz |
| Horizontal: 0.5Hz | |
| Vibration isolation method | Vertical: Diaphragm air spring |
| Horizontal: Parallel swing mechanism | |
| Damping method | Vertical: Air damping using variable orifices |
| Horizontal: Special damping using the α-GEL | |
| Leveling method | Automatic levelers keep the surface table level automatically |
| Load weight(kg) | 300 |
| Table dimensions(mm) | 2400x1500 |
| Table thickness(mm) | 200 |
| Table materials | Steel Honeycomb: Top plate SUS430 5t(4t), Bottom plate SS400 4.5t |
| Machine height(mm) | 800 |
| Machine weight(kg) | 635 |
| Air supply | 0.35~0.70MPa |
| Natural frequency | Vertical: 1.2Hz |
| Horizontal: 0.8Hz | |
| Vibration isolation method | Vertical: Diaphragm air spring |
| Horizontal: Parallel swing mechanism | |
| Damping method | Air damping using orifices |
| Leveling method | Automatic levelers keep the surface table level automatically |
| Load weight(kg) | 300 |
| Table dimensions(mm) | 3000x1200 |
| Table thickness(mm) | 300 |
| Table materials | Steel Honeycomb: Top plate SUS430 5t(4t), Bottom plate SS400 4.5t |
| Machine height(mm) | 800 |
| Machine weight(kg) | 735 |
| Air supply | 0.35~0.70MPa |
| Natural frequency | Vertical: 1.2Hz |
| Horizontal: 0.8Hz | |
| Vibration isolation method | Vertical: Diaphragm air spring |
| Horizontal: Parallel swing mechanism | |
| Damping method | Air damping using orifices |
| Leveling method | Automatic levelers keep the surface table level automatically |
| Load weight(kg) | 300 |
| Table dimensions(mm) | 3000x1500 |
| Table thickness(mm) | 300 |
| Table materials | Steel Honeycomb: Top plate SUS430 5t(4t), Bottom plate SS400 4.5t |
| Machine height(mm) | 800 |
| Machine weight(kg) | 900 |
| Air supply | 0.35~0.70MPa |
| Natural frequency | Vertical: 1.2Hz |
| Horizontal: 0.8Hz | |
| Vibration isolation method | Vertical: Diaphragm air spring |
| Horizontal: Parallel swing mechanism | |
| Damping method | Air damping using orifices |
| Leveling method | Automatic levelers keep the surface table level automatically |
| Load weight(kg) | 300 |
| Table dimensions(mm) | 3600x1200 |
| Table thickness(mm) | 300 |
| Table materials | Steel Honeycomb: Top plate SUS430 5t(4t), Bottom plate SS400 4.5t |
| Machine height(mm) | 800 |
| Machine weight(kg) | 855 |
| Air supply | 0.35~0.70MPa |
| Natural frequency | Vertical: 1.2Hz |
| Horizontal: 0.8Hz | |
| Vibration isolation method | Vertical: Diaphragm air spring |
| Horizontal: Parallel swing mechanism | |
| Damping method | Air damping using orifices |
| Leveling method | Automatic levelers keep the surface table level automatically |
| Load weight(kg) | 300 |
| Table dimensions(mm) | 3600x1500 |
| Table thickness(mm) | 300 |
| Table materials | Steel Honeycomb: Top plate SUS430 5t(4t), Bottom plate SS400 4.5t |
| Machine height(mm) | 800 |
| Machine weight(kg) | 1040 |
| Air supply | 0.35~0.70MPa |
| Natural frequency | Vertical: 1.2Hz |
| Horizontal: 0.8Hz | |
| Vibration isolation method | Vertical: Diaphragm air spring |
| Horizontal: Parallel swing mechanism | |
| Damping method | Air damping using orifices |
| Leveling method | Automatic levelers keep the surface table level automatically |
| Load weight(kg) | 300 |
| Table dimensions(mm) | 4000x1200 |
| Table thickness(mm) | 300 |
| Table materials | Steel Honeycomb: Top plate SUS430 5t(4t), Bottom plate SS400 4.5t |
| Machine height(mm) | 800 |
| Machine weight(kg) | 935 |
| Air supply | 0.35~0.70MPa |
| Natural frequency | Vertical: 1.2Hz |
| Horizontal: 0.8Hz | |
| Vibration isolation method | Vertical: Diaphragm air spring |
| Horizontal: Parallel swing mechanism | |
| Damping method | Air damping using orifices |
| Leveling method | Automatic levelers keep the surface table level automatically |
| Load weight(kg) | 300 |
| Table dimensions(mm) | 4000x1500 |
| Table thickness(mm) | 300 |
| Table materials | Steel Honeycomb: Top plate SUS430 5t(4t), Bottom plate SS400 4.5t |
| Machine height(mm) | 800 |
| Machine weight(kg) | 1145 |
| Air supply | 0.35~0.70MPa |